Mixing of Oxygen in Titanium Nitride Films Formed by Reactive HCD Ion Plating

Nanocharacterization of titanium nitride thin films obtained by reactive magnetron sputtering

Titanium nitride thin films are used in applications such as tribological layers for cutting tools, coating of some medical devices (scalpel blades, prosthesis, implants etc.), sensors, electrodes for bioelectronics, microelectronics, diffusion barrier, bio-microelectromechanical systems (Bio-MEMS) and so on. This work is a comparative study concerning the influence of substrate temperature on ...

Titanium Nitride Thin Films by the Electron Shower Process

Titanium nitride (TiN), a stable compound with the NaCl structure, has a wide range of properties which find applications in cutting tools, wear resistant parts, semiconductor metallization, and the jewelry industry. However, there are problems with preparing highly adhesive thin films which maintain good properties. Thin films of titanium nitride have been prepared by the Electron Shower (ES) ...

Decorative Titanium Nitride Colored Coatings on Bell-Metal by Reactive Cylindrical Magnetron Sputtering

The transition metal nitrides like titanium nitride exhibit very interesting color variation properties depending on the different plasma deposition conditions using cylindrical magnetron sputtering method. It is found in this deposition study that nitrogen partial pressure in the reactive gas discharge environment plays a significant role on the color variation of the film coatings on bell-met...

Substrate Effects on the APCVD Growth of Titanium Nitride Films

Local electric-field-induced oxidation of titanium nitride films

Nanometer-scale patterning of TiN films grown on SiO2 /Si(001) has been demonstrated using the local electric-field-induced oxidation process with a conductive-probe atomic force microscope. The chemical composition of the modified TiN region was determined by micro-Auger electron spectroscopy and was found to consist of Ti, some trace amount of N, and O, suggesting the formation of titanium ox...